In systems with moving stages, the reaction forces can lead to unacceptable high vibrations. With the force cancellation upgrade of our vibration isolation modules, these reaction forces are compensated, thereby strongly reducing the resulting vibrations. Equipment like wafer inspection systems, pick and place machines, high-precision manufacturing equipment highly benefit from such force compensation.
With our AVI-mount dynamically well-defined suspension of systems or modules is achieved. The more isolation of the system from the floor is required, the more compliant the suspension needs to be. A drawback is that this simultaneously increases the vibration amplitude of the machine due to the stage reaction forces. A good way to reduce the vibration amplitude is by applying a cancellation force.
Our passive vibration isolation modules can be upgraded to generate the above said cancellation force. Two linear, Lorentz-type actuators are added to the AVI-mount, to produce a well-controlled and synchronized counter force by means of feedforward. The reaction forces of these actuators act directly on a stiff (and heavy) floor, thereby minimizing the disturbing force to the system.
AVI-mount Passive with Force Cancellation series key features
- Up to a factor 20 reduction of setpoint induced vibrations in 6 DoF
- Well-defined dynamics: suspension frequencies and high damping
- Cost effective and easily mounted in your existing system
- Clean room compatible
- High positional stability (creep free)
- Leveling range Z: ±4 mm
- Integrated end of strokes
- Control implementable at MI-P or customer platform